What is the main advantage of Salicide process?

These silicides have fairly low resistivity and good high-temperature-stability. The self-aligned-silicide (salicide) process is widely used in integrated circuits to reduce polysilicon gate resistance and source/drain contact resistance. The self-aligned-silicide technology possesses a number of advantages.

What is silicide used for?

Abstract. Metallic silicides and germanides are used as contact materials on source/drain and gate in metal oxide semiconductor (MOS) structures such as transistors or memories. They are fabricated by reaction between a metal or a metallic alloy thin film and the Si (Ge) substrate.

What is silicide in semiconductor?

Silicide (compound of silicon with metal) is formed on gates (polysilicon), sources and drains (Si wafer) as three MOS transistor electrodes in order to reduce contact resistance to metal wiring layers to be formed later. This silicide formation also has the effect of lowering the resistance of each electrode.

What is silicide diffusion?

Generally, silicide layers are fast diffusion pathes for silicon point defects and other chemical elements. Due to the different linear thermal expansion coefficients of silicide materials compared to other semiconductor materials stress will be induced during thermal treatment.

What is the meaning of silicide?

A silicide is a type of chemical compound that combines silicon and a (usually) more electropositive element. Silicon is more electropositive than carbon. Silicides are structurally closer to borides than to carbides. The chemical bonds in silicides range from conductive metal-like structures to covalent or ionic.

What is silicide in periodic table?

Technically the term silicide is reserved for any compounds containing silicon bonded to a more electropositive element. Transition metals form metallic silicides, with the exceptions of silver, gold and the group 12 elements. The general composition is MnSi or MSin with n ranging from 1 to 6 and M standing for metal.

What is a silicide and how is it formed?

A silicide is a type of chemical compound that combines silicon and a (usually) more electropositive element. The chemical bonds in silicides range from conductive metal-like structures to covalent or ionic. Silicides of all non-transition metals, with exception of beryllium, have been described.

What is the formula of silicide?

Silicide(1-)